The hyperprobe JXA-8530F is the second generation of JEOL electron beam microprobes, which, thanks to a Schottky field emission source, helps to advance the application ranges for microanalysis. For the JXA-8530F, the electron optics and the vacuum system have been redesigned and radically improved. This means, that a significantly smaller beam diameter is available especially for micro analyses at low acceleration voltages.
Analyses reaching deep into the sub-micron range, analyses at sensitive specimen, high resolution images under analysis conditions become reality with the Hyperprobe JXA-8530F. As with the JXA-8230, the device can be equipped with 1 - 5 crystal spectrometers (WDS) as well as an additional EDS system. Three different spectrometer types with special crystals are available for the combination of virtually any application.
Thông số kỹ thuật
| Electron optics |
|
|
Electron source
|
Field emission with in-lens Schottky emitter
|
|
Acceleration voltage
|
1 to 30 kV
|
|
Specimen current
|
10-11 to 5•10-7 A
|
|
Beam current stability
|
±0.3% / h
|
|
Resolution in SE image
|
3 nm
|
|
Minimum beam diameter
|
40 nm at 10-8 A, 100 nm 10-7 A (10 kV)
|
|
Magnification
|
x40 to x300,000
|
>>> Mua JXA-8530FPLUS giá hấp dẫn