Measured flow rate range
(full scale display) |
1SLM, 2SLM, 5SLM, 10SLM 20SLM |
(50SLM) |
| Flow units |
SLM (0 ℃, 1atm) |
| Measurement target gas |
Air, N2, O2 |
| Flow rate accuracy |
FS ± 2% |
FS ± 3% |
| Reproducibility |
Within ± 0.5% FS |
| Minimum operating differential pressure |
65Pa ~ 2kPa more |
3kPa ~ 9.8kPa or more |
| Use unavailable pressure |
980kPa (10kgf / cm2G) |
| Breakdown |
980kPa (10kgf / cm2G) |
| External leak standard |
1 × 10-7Pa · m3 / sec or less |
| Usable temperature |
5 ~ 60 ℃ (guaranteed accuracy: 15 ℃ ~ 35 ℃) |
| Flow rate output signal |
0 ~ 5VDC (output impedance 45Ω) |
| Use power |
15V ± 0.5VDC Tasu 40MA
-15V ± 0.5VDC 10MA |
| Body connection port |
Rc1 / 4 |
| Gas connection material |
SUS303, Viton |
| Dimensions |
59 × 26.6 × 65 (mm) |
| weight |
350g |
|