| Measuring fluid | 
            Liquid (water, cooling water, etc.)  
            gas (AIR, N2, CO2, Ar, etc.) 
             | 
         
        
            | Scale range | 
            10: 1 | 
         
        
            | Maximum flow | 
            Liquid 0.2 ~ 2L / min  
            gas 10 ~ 100NL / min | 
         
        
            | Body material | 
            SUS304 | 
         
        
            | Tapered tube material | 
            Hard glass | 
         
        
            | Float material | 
            SUS304 | 
         
        
            | Connection method | 
            Rc connection | 
         
        
            | Port size | 
            Rc1 / 4B, Rc1 / 8B | 
         
        
            | Flow rate accuracy | 
            ± 3% within FS | 
         
        
            | Mounting direction | 
            Vertical direction | 
         
        
            | Flow direction | 
            Back under → on the back | 
         
        
            | Maximum working pressure | 
            1.0MPa | 
         
        
            | Maximum operating temperature | 
            80 ℃ | 
         
        
            | Dimensions | 
            150mm | 
         
    
 
 
  
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