| Stage type |
Stage model Number |
Setting value(default:3) |
Home position (origin) return method |
| X Linear Stage |
XA04A-R101(-R) |
4 |
Home position return method is determined with Home position sensor in motion range. |
| YA04A-R101 (-RRR) |
| XA04A-R2 (-R) |
| YA04A-R2 (-RRR) |
| XA07A-R2H (-R) |
| YA07A-R2H (-RRR) |
| XA10A-R2H (-R) |
| YA10A-R2H (-RRR) |
| XA16F-L21 (-R) |
1 |
Home position return method is determined with zone (datum) sensor. |
| XA16F-L22 (-R) |
| XA16F-L23 (-R) |
| Vertical Stage |
ZA04A-W1 |
7 or 8 |
Home position return method is determined with limit sensor. |
| ZA05A-V1(Stop to order Product) |
4 |
home position (origin) return method is determined with Home position sensor in motion range. |
| ZA05A-W1 |
| ZA05A-W2C |
| ZA07A-V1F |
| ZA10A-32F |
1 |
Home position return method is determined with zone (datum) sensor. |
| ZA16A-32F |
| Rotation Stage |
RA04A-W |
7 or 8 |
Home position return method is determined with limit sensor. |
| Swivel (Tilt) Stage |
SA04B-RT/M (-R) |
4 |
home position return method is determined with Home position sensor in motion range. |
| SA05A-R2T/M/B/S/L (-R) |
| SA07A-R2T/M/B/S/L (-R) |