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Model
|
ACEPOM2010H
|
ACEPOM3020H
|
ACEPOM4030H
|
ACEPOM5040H
|
|
Detect area
|
200*100(mm)
|
300*200(mm)
|
400*300(mm)
|
500*400(mm)
|
|
accuracy
|
（3+L/200）μm
|
（3+L/200）μm
|
（3+L/200）μm
|
（3+L/200）μm
|
|
Size（mm）
|
380*580*900
|
480*680*900
|
580*780*900
|
680*880*900
|
|
Weight
|
180kg
|
240kg
|
300kg
|
350kg
|
|
Mechanical system
|
Base，column：Accuracy level 00 Granite，Flatness 3μm, stable
|
|
Slide way： P class V high balance cross guide rail
|
|
Grating ruler： Close high precision grating ruler, 1μm resolution
|
|
Z axix driving system：Manual
|
|
Optional configuration： RENISHAW 3D probe（For 3D measurement）
|
|
Optional configuration : KEYENCE laser（For the measurement of height , depth ,flatness, and so on）
|
|
Optical system
|
CCD
|
TEO High resolution 1/3 colour CCD
|
|
Lens
|
|
|
Surface light
|
LED: Ring cold light source, stable light source, long life
|
|
Profile light
|
LED: Circular cold light source, stable light source, long life
|
|
Program system
|
zonson Automatic measuring system
|
|
0.1 micron resolution four-axis automatic uwc4000i resolution system
|
|
Hd SDK3200 video capture system
|
|
Accessories
|
Maintenance manual
|
|
Delivery inspection report
|
|
1 micron resolution calibration film
|
|
Each applicable connecting wire
|